Research within the microsystems engineering priority cluster at Furtwangen focuses on microsystems engineering, microelectronics, and nanotechnology. 

Highly qualified scientists and a well-equipped cleanroom provide the best conditions for such developments as:

  • Micromechanical sensors: for measuring movement, pitch, sound, pressure, and moisture 
  • Microelectronics: for processing digital and analogue signals 
  • Structuring and characterisation at the nano level 


Silicon-based micromechanical pitch sensors and microphones and active optical membrane mirrors are just a few examples of products we have developed in cooperation with industry. Design and simulation are aided by modern CAD, FEM, and VHDL tools.

Almost all of our projects are conducted in close collaboration with research partners like the University of Freiburg, the Institute for Microtechnology and Information Engineering (Institut für Mikrotechnik und Informationstechnik), and the Fraunhofer Institute for Physical Measurement Techniques (Fraunhofer Gesellschaft für Physikalische Messtechnik) in Germany, as well as such international partners as MFA Budapest (Hungary) and Tula State University (Russia).

Since 2002, Furtwangen University has contributed to Baden-Württemberg's Centres for Applied Research (Zentren für Angewandte Forschung) by leading the Centre for Microtechnology and Systems Integration (Zentrum für Mikrotechnik und Systemintegration), which is currently part of ZAFH Photonn (coordinated by Aalen University).

Projects within the microsystems engineering priority cluster 

  • Micromoulding and MISS 3D 
  • Sensor arrays for measuring air quality
  • MiaBoss active optical membrane mirror
  • Min-i-Dos
  • ZAFH Photonn
  • Microstamping
  • µECM
  • IQ MicroTEC