Innovative Electrochemical Microstructuring Processes

Target structures are for example, curved microchannels with electropolished surfaces.

The aim of the project is to research methods and processes to create complex 3D microstructures in semi-conductors and glasses. The focus is on electrochemical processes (ECP) such as ECA (Electro Chemical Anodization), ECM (Electro Chemical Machining) and EDM (Electro Discharge Machining).

In this project, innovative process types will be examined and tested on specific applications of fluidics and optics. To do this, model building/simulation, experiments and process control and measurement process methods will be used.

The innovative core of the project is the use of "auxilliary electrodes" in the electrochemical process which makes the processing of non-conductive materials possible. It also improves the flexibility of ECP with regard to the manufacture of moulds and geometric profiles, as well as precision in relation to lack of mould deformation and surface quality.

Project Partners

Furtwangen University (Project leaders)
University of Freiburg, Institute for Microsystems Engineering (IMTEK)

Duration: 2014-2016, 24 Months

The project is funded by the Baden-W├╝rttemberg Ministry of Science, Research and the Arts (MWK) as part of the  "Innovative Projects/Cooperative Projects" funding programme.


Prof. Dr. Ulrich Mescheder
Board of Executives, Faculty of Mechanical and Medical Engineering
Vice President Research and Development, Technology transfer
Director of Institute for Applied Research
Tel: +49 (0)7723 920-2232
Fax: +49 (0)7723 920-2633
Furtwangen Campus, Room B 1.10
Email: mes(at)