Microsystems are systems in which electronic and non-electronic functions are integrated in a systemic manner in a very small area (chip). To do so, structures in the range of micrometres (10-6 m) are needed, which are produced using microengineering processes. Microsystems are implemented by the million in automobiles (sensors), in communications technology (smartphones, projectors, printers) and in medical technology (retina and cochlea implants).

In the Institute for Microsystems Technology (iMST), new microsystems and their corresponding modeling and production processes, as well as characterization methodology are researched. In keeping with the character of microsystems engineering as an interface technology, the work carried out covers several different areas:

  • Miniaturized sensors and actuators: research of new principles and design possibilities
  • Micro- and nanotechnology (production processes in the manufacture of microsystems)
  • Functional coatings for medical technology
  • Anti-corrosion coatings using Atomic Layer Deposition (ALD)
  • Implantable microsystems
  • Microfluidic systems