• Practicals for partner universities
  • Training courses for industry
  • Contract work (execution of individual or complete processes; prototype development - particularly the development of physical sensors and actuators; consulting and support in development and manufacture of microsystems; characterization and fault analysis; simulations)

Joint research projects: our competences

Development of microtechnical sensors and actuators, micro- and nanotechnical processes, multiphysics system modelling and simulation, as well as characterization technology for microsystems. The workgroup has many years of experience in micro- and nanotechnology.

Projects are carried out in the fields of technology development for micro- and nanostructures and miniaturized Si-based systems (sensors and actuators).

So far, the following projects have been carried out:

  • 3D etching of microforms
  • air quality sensors
  • optical biosensors
  • bonding with nanostructured porous Si
  • nano- and ultrafiltration
  • surface micromechanics using porous silicon as a sacrificial layer
  • micro-rotating mirror
  • optical tweezers
  • microstamping
  • Si membrane mirror for autofocus
  • gradient sensor
  • micromechanical microphone and vibration-based energy harvester (smart energy)

Examples of sensors and actuators realized at Furtwangen University